24 September 1996 Self-aligned processing techniques for semiconductor stripe lasers
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Proceedings Volume 2886, Semiconductor Lasers II; (1996) https://doi.org/10.1117/12.251900
Event: Photonics China '96, 1996, Beijing, China
In this article we will generalize and analyze different self-aligned techniques for different stripe lasers, for example: ridge waveguide lasers, buried heterostructure stripe lasers, mushroom-stripe lasers, etc. Finally, a novel self-aligned processing technique for fabricating buried mushroom-stripe lasers is proposed and it has been utilized successfully in fabricating bent waveguide mushroom-stripe MQW DFB lasers.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hongliang Zhu, Hongliang Zhu, Hartmut Hillmer, Hartmut Hillmer, } "Self-aligned processing techniques for semiconductor stripe lasers", Proc. SPIE 2886, Semiconductor Lasers II, (24 September 1996); doi: 10.1117/12.251900; https://doi.org/10.1117/12.251900

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