30 September 1996 Superthin multilayer mirror
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The rule of the distortion introduced by pressure and thermal stresses in the active cooling mirror were proved experimentally. In order to minimize the distortion of a mirror the active cooing mirror should be consisted of a thin faceplate layer, a good heat exchanger layer and a hard rigidity substrate. According to this requirement of a superthin multilayer mirror were designed. Its maximum distortion was only 0.10 micrometers , when the 8.69kw laser beam was incident on the surface of mirror and the coolant pressure was 0.13MPa.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yaoning Zhang, Yaoning Zhang, ZuHai Cheng, ZuHai Cheng, Geng Ku, Geng Ku, Zhemin Du, Zhemin Du, Feng Li, Feng Li, } "Superthin multilayer mirror", Proc. SPIE 2888, Laser Processing of Materials and Industrial Applications, (30 September 1996); doi: 10.1117/12.253150; https://doi.org/10.1117/12.253150

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