30 September 1996 Superthin multilayer mirror
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Abstract
The rule of the distortion introduced by pressure and thermal stresses in the active cooling mirror were proved experimentally. In order to minimize the distortion of a mirror the active cooing mirror should be consisted of a thin faceplate layer, a good heat exchanger layer and a hard rigidity substrate. According to this requirement of a superthin multilayer mirror were designed. Its maximum distortion was only 0.10 micrometers , when the 8.69kw laser beam was incident on the surface of mirror and the coolant pressure was 0.13MPa.
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Yaoning Zhang, Yaoning Zhang, ZuHai Cheng, ZuHai Cheng, Geng Ku, Geng Ku, Zhemin Du, Zhemin Du, Feng Li, Feng Li, } "Superthin multilayer mirror", Proc. SPIE 2888, Laser Processing of Materials and Industrial Applications, (30 September 1996); doi: 10.1117/12.253150; https://doi.org/10.1117/12.253150
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