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30 September 1996 High-power excimer laser and application
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Abstract
A high power XeCl and KrF excimer lasers pumped by an intense relativistic electron beam have been developed. The pump power density ranges between 1.5 to 2.0 MW/cm3. The maximum output energy of 136 J with the peak power of 1.5 GW is obtained for the XeCl laser. In KrF laser case, the maximum output energy is 157 J and the peak power 2.0 GW. The UV laser interaction with some materials has been studied by this excimer laser.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jingru Liu, Xiao Yuan, Yugang Gan, Xueqing Zhao, Aiping Yi, Xiaohong Wang, Longhua Wang, Yanming Wei, Aici Qiu, and R. F. Sun "High-power excimer laser and application", Proc. SPIE 2889, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers, (30 September 1996); https://doi.org/10.1117/12.253310
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