kHz repetition rate operation of excimer laser

HongJin Park; Choo Hie Lee

doi:10.1117/12.253253

30 September 1996 kHz repetition rate operation of excimer laser

HongJin Park, Choo Hie Lee

Proceedings Volume 2889, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers; (1996) https://doi.org/10.1117/12.253253
Event: Photonics China '96, 1996, Beijing, China

Abstract

We have developed an excimer laser of compact coaxial type which the one line cross flow fan is only used. At 1 kHz repetitive operation, the average power of KrF laser is 56 watt. In this paper, the design parameters and CR characteristics are investigated for the attainment of the 1 kHz excimer laser. We have obtained the overall efficiency of 1.2% with KrF laser gas. At this time, CR and the variation of laser output are 2.97, +/- 9%, respectively. Laser gas volume and active volume are 10 liter, 1.8 (H) X 1.2 (W) X 30 (L) equals 64.8, respectively.

Citation Download Citation

HongJin Park and Choo Hie Lee "kHz repetition rate operation of excimer laser", Proc. SPIE 2889, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers, (30 September 1996); https://doi.org/10.1117/12.253253

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