Paper
30 September 1996 Plasma-polymerization-deposited transparent protective coating for plastic display window
Author Affiliations +
Proceedings Volume 2892, Display Devices and Systems; (1996) https://doi.org/10.1117/12.253332
Event: Photonics China '96, 1996, Beijing, China
Abstract
The technique of mid-frequency plasma polymerization was employed to deposit scratch-resistant and anti-fogging films on transparent polycarbonate substrates. The input monomer used for depositing scratch-resistant coatings was tetramethyldisiloxane (TMDSO). Variation of oxygen-to-TMDSO ratio study indicated that the hardest film was formed using equal amount of oxygen and TMDSO. The typical deposition rate was about 3 micrometers /hr. Typical operation pressure, TMDSO flow and oxygen flow were 2 X 10-2 Torr, 30 sccm and 30 sccm, respectively. The deposited polysiloxane layer was characterized as a hard, highly transparent and durable against scratching and abrasion film. Further depositing a thin hydrophilic film on top of the polysiloxane layer significantly improved the surface wettability and therefore dramatically increased the anti-fogging capability. The monomer used for polymerization deposition of the anti- fogging film was vinyl acetate, and the typical flow for vinyl acetate monomer and oxygen were 15 sccm and 10 sccm, respectively.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daoyang Huang, Rung-Ywan Tsai, and Fang Chung Ho "Plasma-polymerization-deposited transparent protective coating for plastic display window", Proc. SPIE 2892, Display Devices and Systems, (30 September 1996); https://doi.org/10.1117/12.253332
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KEYWORDS
Plasma

Polymerization

Oxygen

Coating

Absorption

Infrared radiation

Silicon

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