20 September 1996 Low-cost single-mode refractive plate switch using micromachined silicon waferboard for passive alignment
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Anisotropically etched v-grooves on silicon substrate for the positioning of optical fibers have been widely implemented in fiber optics and optoelectronic applications. Because the anisotropic etching depends upon the crystallographic orientation of silicon, the v-grooves are normally formed parallel to the <110> direction. However, some applications, such as optical switches, and wavelength division multiplexing/demultiplexing devices, fan-in and fan-out configuration for fiber positioning are required. In this paper, we will report a single mode refractive plate switch where a micromachined silicon waferboard was implemented for passively positioning optical fibers. We successfully demonstrated a 2 X 2 single mode optical switch with less than 0.64 dB loss.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hongtao Han, Hongtao Han, Bernie Caron, Bernie Caron, Warren H. Lewis, Warren H. Lewis, Jay Mathews, Jay Mathews, Robert Addison Boudreau, Robert Addison Boudreau, Terry P. Bowen, Terry P. Bowen, Dale D. Murray, Dale D. Murray, } "Low-cost single-mode refractive plate switch using micromachined silicon waferboard for passive alignment", Proc. SPIE 2893, Fiber Optic Components and Optical Communication, (20 September 1996); doi: 10.1117/12.252076; https://doi.org/10.1117/12.252076


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