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25 September 1996 8x8 silicon photodiode matrix module
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Abstract
8 X 8 silicon photo diode matrix module has been successfully fabricated by hybrid integrating technique. In this paper, the principle, the design, the structure, fabrication process and its main parameters of PIN-PD matrix module which has special arrangement of electrode and structure of piling up optical-electro isolation are mainly described.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dawei He, Jinggui Lu, and Fuwen Zhang "8x8 silicon photodiode matrix module", Proc. SPIE 2894, Detectors, Focal Plane Arrays, and Applications, (25 September 1996); https://doi.org/10.1117/12.252118
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