25 September 1996 High Tc superconducting microbolometer detector arrays
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8-element microbolometer detector arrays of high Tc superconducting films have been fabricated using both granular and epitaxial YBCO films deposited by electron beam evaporation with post annealing and laser ablation respectively. The devices were patterned by ion beam milling. The characteristics for optical response of the arrays were investigated in the region of 8 approximately 14 micrometers . A blackbody at the temperature of 500 K was used as a radiation source for sensitivity measurement. The microbolometer array was mounted in a temperature variable dewar. The operating temperature of the array was regulated at the center of the resistive transition edge using a temperature controller. The average noise equivalent power and the average normalized detectivity of the arrays were in the order of 10-12 WHz-1/2 and 109 cmHz1/2W-1 respectively at the chopping frequency of 10 Hz. The frequency response of the arrays were also studied in our experiments.
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Zhihong Mai, Zhihong Mai, Xinjian Yi, Xinjian Yi, Xing-Rong Zhao, Xing-Rong Zhao, Fang Qiao Zhou, Fang Qiao Zhou, Luqin Liu, Luqin Liu, } "High Tc superconducting microbolometer detector arrays", Proc. SPIE 2894, Detectors, Focal Plane Arrays, and Applications, (25 September 1996); doi: 10.1117/12.252094; https://doi.org/10.1117/12.252094

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