30 September 1996 Optical waveguide formed by aluminum nitride thin film on sapphire
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Abstract
We have investigated an optical waveguide formed by aluminum nitride (AlN) thin film on sapphire. A good quality AlN thin film on sapphire substrate was prepared by metal organic chemical vapor deposition in this laboratory. A rutile prism coupler was employed to display the waveguide modes with the wavelength of 632.8, 532.1, 514.5 and 488.0nm. The refractive index and thickness of the waveguide material is obtained by prism-coupler measurement. The dispersion curve of AlN film is given and the dispersion equation is derived. The attenuation in waveguide is evaluated using scattering loss measurements by using a fiber probe in this experiment. The attenuation coefficient alpha is 1.5-2.1 cm-1 various with different sample and the different modes of waveguide. The accuracy of the measurement is discussed.
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Xiao Tang, Yifang Yuan, Kobchat Wongchotigul, Michael G. Spencer, "Optical waveguide formed by aluminum nitride thin film on sapphire", Proc. SPIE 2898, Electronic Imaging and Multimedia Systems, (30 September 1996); doi: 10.1117/12.253402; https://doi.org/10.1117/12.253402
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