3 October 1996 Absolute calibration of interpolation errors in interferometers
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Abstract
Two novel self-calibration methods are proposed for calibrating fringe-interpolation errors of interferometers with nanometer resolution, and the basic characteristics of the methods are discussed. The one method owes its accuracy to the repeatability of the displacement of PZT actuator which gives input displacement to the calibrated interferometer. This method needs only one interferometer. The other method uses two interferometers, which has been proposed for the calibration of linearity error of general displacement sensors. The calibration accuracy of this method theoretically approaches the resolution limit of the interferometer, which is determined by the signal-to-noise ratio and the stability of the measurement system. A compact differential interferometer that uses a laser diode as the light source has been developed in order to demonstrate the viability of the proposed former calibration method. As the specimens for the other method interferometers using optical fiber have been developed. The reflected beam from the one end of the optical fiber and that from the target mirror make interference fringes in this interferometer. The conventional fringe-counting and phase modulation methods are combined in order to extend the measurement range and improve the resolution of these error which causes interpolation error in the interferometer. The calibration results have shown that both methods can attain nanometric accuracy judging from the repeatability. Therefore it was confirmed that the absolute nanometric calibration is realized with each method when the wave length of the interferometer is known.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Satoshi Kiyono, Zongtao Ge, "Absolute calibration of interpolation errors in interferometers", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.252999; https://doi.org/10.1117/12.252999
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