Compensation for periodic errors in laser interferometer of phase subdivision model

Shuan Qi; Wenyi Deng; Gang Liu

doi:10.1117/12.253055

3 October 1996 Compensation for periodic errors in laser interferometer of phase subdivision model

Shuan Qi, Wenyi Deng, Gang Liu

Proceedings Volume 2899, Automated Optical Inspection for Industry; (1996) https://doi.org/10.1117/12.253055
Event: Photonics China '96, 1996, Beijing, China

Abstract

When the phase of interference signals is directly subdivided, nonlinear errors, some of which are periodic, will be produced due to the improper assembly and defects of optical elements. In order to compensate for such errors, this paper puts forward a principle of compensation and introduces a device including two (lambda) /4 wave plates or two orthogonal axes and a V-shaped double-plate splitter, by which a beam is divided into two. This device is theoretically proved int his paper.

Citation Download Citation

Shuan Qi, Wenyi Deng, and Gang Liu "Compensation for periodic errors in laser interferometer of phase subdivision model", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253055

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