3 October 1996 Homogeneity measurement using an infrared interferometer
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Abstract
An interferometric method is used to evaluate the refractive index deviation in the infrared materials. The deformations of the surfaces on the sample are precisely measured by phase shifting interferometer working at 0.6328 micrometers and the errors introduced by the surface deformations are removed from the results. The accuracy of this method reaches the order of 10-5.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lei Chen, Lei Chen, Jinbang Chen, Jinbang Chen, Shenwang Huang, Shenwang Huang, Guoyou Jin, Guoyou Jin, } "Homogeneity measurement using an infrared interferometer", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253082; https://doi.org/10.1117/12.253082
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