3 October 1996 Infrared phase-shifting digital interferometer
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This paper describes theory and performance of a self- developed IR phase-shifting digital interferometer which uses a CO2 laser as light source, this instrument comprises of a Fizeau interferometer whose aperture reaches (Phi) 250mm with accuracy better than (lambda) /50, and a Twyman spherical interferometer. Using piezoelectric transducer to shift reference mirror, phase measurement interferometry can be carried out as well as the temperature modulation of PEV target. A series of software packages used as wavefront fitting, image quality evaluation, are incorporated into the instrument. With the help of microcomputer, this interferometric system can measure refractive-index homogeneity of IR transmitting materials, wavefront error of IR optical system and surface quality of rough surface etc., which can all be shown by detailed data of optical path difference, vivid 2D contour and 3D surface.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jinbang Chen, Jinbang Chen, Lei Chen, Lei Chen, Shenwang Huang, Shenwang Huang, Guoyou Jin, Guoyou Jin, } "Infrared phase-shifting digital interferometer", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253083; https://doi.org/10.1117/12.253083

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