3 October 1996 Measurement of scanning prism by laser Haidinger interference
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It is usually difficult to reach an expected testing accuracy using general methods to measure the scanning prism. So this paper puts forward a new method of testing the angular error and pyramidal error of the scanning prism by the Haidinger interference. The relative formulas are deduced, the testing method and instrument are presented in the paper. We also analyzed the testing accuracy. The actual testing accuracy of this method is about 0.5 inches. It is one of the best methods with high accuracy at present. In addition, this method can be used to estimate the surface deviation according to the interferogram. This method belongs to common path interference. The fringe is stable and reliable.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhiwen Yang, Zhiwen Yang, XiangLan Xue, XiangLan Xue, Wei An, Wei An, } "Measurement of scanning prism by laser Haidinger interference", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253075; https://doi.org/10.1117/12.253075


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