Paper
3 October 1996 New method for measuring the properties of optical systems with micro-optic components
Weijian Tian, Jianwen Yang, Zhengkang Bao, Hedong Zhang, Bo Chen, Lurong Guo
Author Affiliations +
Abstract
Utilizing micro-optics components, a new technique for measuring the properties of optical system is developed in this paper. The micro-optics components have been composed of a microlens array and a matched array of pinholes. Passing through the micro-optics array components, the light beam projects into the tested optical system, and is detected as a power spectrum by CCD plane array at last. By processing and analyzing the information from CCD detector, some main properties of tested optical system can be obtained. The experimental results are satisfactory due to the 2D plane symmetry and high power efficiency of the micro-optics array components.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Weijian Tian, Jianwen Yang, Zhengkang Bao, Hedong Zhang, Bo Chen, and Lurong Guo "New method for measuring the properties of optical systems with micro-optic components", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253050
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KEYWORDS
Micro optics

Microlens array

Wavefronts

Charge-coupled devices

Optical testing

Sensors

CCD image sensors

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