3 October 1996 Principle of AOM laser heterodyne measuring and its instrument
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Laser measuring is one of the main methods in precision measuring. Two-frequency laser measuring using Zeeman effect is a usual measuring method, which has better anti-jamming characteristic and higher measuring accuracy. But because of higher cost and lower motion velocity of the measured workpiece, its application is restricted. Acousto-optical modulated laser heterodyne measuring which has many advantages is researched and discussed in theory in this paper. And the realization of the measuring instrument is studied carefully. The method shows a new way for measuring the displacement with lower cost and higher accuracy.
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Fengzhou Fang, Fengzhou Fang, Yiqun Zhang, Yiqun Zhang, Dingwen Zhou, Dingwen Zhou, Guoxiong Zhang, Guoxiong Zhang, } "Principle of AOM laser heterodyne measuring and its instrument", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253094; https://doi.org/10.1117/12.253094

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