3 October 1996 Research of the technology for edge checkout using laser half focus
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Abstract
In this paper, a new method for edge location-laser half- focus edge checkout is introduced. To ensure high precision of the edge checkout, many comprehensive techniques such as self adaptive tracking for compensation, laser modulating and compensating for modulated amplitude, fixed-point sampling technique by differentiation and fine dividing technique for the step of step motor, etc., have been used. A theoretical model for the edge checkout using laser half- focus and the result of computer simulating are also given. In addition, a system of measuring diameter adopting this method is described. The measuring uncertainty 2 (sigma) of the system is within 3 micrometers .
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Haibao Lu, Haibao Lu, Tingzheng Shen, Tingzheng Shen, Yueke Wang, Yueke Wang, Rui Huang, Rui Huang, } "Research of the technology for edge checkout using laser half focus", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253057; https://doi.org/10.1117/12.253057
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