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3 October 1996 Research on photoelectric autoinspecting system of formal and positional errors
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Abstract
This paper discusses the working principle of a photoelectric auto-inspecting system which is used to measure three formal and positional errors of a workpiece at the same time, design of the fine mechanical system and accuracy analysis. This system is very suitable for dynamic and non-contact measurement and has a very good developing future.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tiejun Zhao, Xiaoman Wang, Lu Song, and Chengzhi Li "Research on photoelectric autoinspecting system of formal and positional errors", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253071
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