3 October 1996 Research on photoelectric displacement online measuring technology
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Abstract
This paper describes a photoelectric non-contact surface displacement measuring system using reflection light displacement differentiate method. In this system light source is semiconductor laser, photoelectric receiver is semiconductor position sensor device, using transverse photoelectromotive force effect in the PSD's p-n junction to detect irradiates position of incident light point. In has accurate, fast and harmless characteristics. In order to improve measurement accuracy, a microprocessor is added into this system to complete digital filter, linear correcting and statistic processing in the course of measurement. Especially, this paper introduces stabilizing electronically light, extracting PSD signals and processing data with computer, etc in detail.
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Xiaoman Wang, Lu Song, Jiandong Yang, "Research on photoelectric displacement online measuring technology", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); doi: 10.1117/12.253072; https://doi.org/10.1117/12.253072
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