11 December 1996 Automated micromanipulation desktop station based on mobile piezoelectric microrobots
Author Affiliations +
Proceedings Volume 2906, Microrobotics: Components and Applications; (1996) https://doi.org/10.1117/12.260630
Event: Photonics East '96, 1996, Boston, MA, United States
Abstract
One of the main problems of present-day research on microsystem technology (MST) is to assemble a whole micro- system from different microcomponents. This paper presents a new concept of an automated micromanipulation desktop- station including piezoelectrically driven microrobots placed on a high-precise x-y-stage of a light microscope, a CCD-camera as a local sensor subsystem, a laser sensor unit as a global sensor subsystem, a parallel computer system with C167 microcontrollers, and a Pentium PC equipped additionally with an optical grabber. The microrobots can perform high-precise manipulations (with an accuracy of up to 10 nm) and a nondestructive transport (at a speed of about 3 cm/sec) of very small objects under the microscope. To control the desktop-station automatically, an advanced control system that includes a task planning level and a real-time execution level is being developed. The main function of the task planning sub-system is to interpret the implicit action plan and to generate a sequence of explicit operations which are sent to the execution level of the control system. The main functions of the execution control level are the object recognition, image processing and feedback position control of the microrobot and the microscope stage.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sergej Fatikow, "Automated micromanipulation desktop station based on mobile piezoelectric microrobots", Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); doi: 10.1117/12.260630; https://doi.org/10.1117/12.260630
PROCEEDINGS
12 PAGES


SHARE
RELATED CONTENT

AFM-based force microsensor for a microrobot
Proceedings of SPIE (October 08 2001)
Protective operating system shell environment for robots
Proceedings of SPIE (September 15 1995)
Robotics Technology In Japan And Its Impact On Workers
Proceedings of SPIE (August 28 1984)
Industrial Robots: Today And Tomorrow
Proceedings of SPIE (May 28 1980)
Towards A Modular Robotic Architecture
Proceedings of SPIE (March 10 1989)

Back to Top