11 December 1996 Microassembly of a piezoelectric miniature motor
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Proceedings Volume 2906, Microrobotics: Components and Applications; (1996) https://doi.org/10.1117/12.260619
Event: Photonics East '96, 1996, Boston, MA, United States
Abstract
Presented is an assembling method for the fabrication of a piezoelectric miniature motor. The fabrication is done by placement and soldering of actuator elements to a substrate. The assembly of the miniature motor demands high precision (plus or minus 1 micrometer), four-axes positioning which is fulfilled by a special micropositioning stage. A particular assembling sequence is used and critical process and performance parameters are evaluated. One of the important factors is the joint strength between actuator element and substrate. A joint strength as high as 100 MPa has been measured which would allow for torque values in the range of 15 mNm for a 4 mm diameter motor.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mats Bexell, Stefan A. I. Johansson, "Microassembly of a piezoelectric miniature motor", Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); doi: 10.1117/12.260619; https://doi.org/10.1117/12.260619
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