11 December 1996 Stick and slip actuators and parallel architectures dedicated to microrobotics
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Proceedings Volume 2906, Microrobotics: Components and Applications; (1996) https://doi.org/10.1117/12.260626
Event: Photonics East '96, 1996, Boston, MA, United States
Abstract
Stick and slip actuators are particularly well adapted to microrobotics. A simple design, a very high intrinsic resolution (a few nanometers) and a high rigidity makes them specially interesting for high precision micro manipulations. Moreover, a smart design allows the user to combine the guiding and actuating functions. Parallel architectures are attractive to microrobotics too. They present a high rigidity and the actuators are fixed on the base. This paper deals with the integration of stick and slip actuators in a 6-degrees-of-freedom parallel structure dedicated to the micro assembly of optical components. In section 3 we describe and characterize inertial actuators using the stick and slip effect. We demonstrate their performances (velocity higher than 1.5 mm/s, 10 nm precision) and limits. In section 4 we describe the 6- degrees-of-freedom parallel architecture that we developed for our application and how the actuators are integrated into it. Its kinematics, the joins' forces and the working volume have been calculated. A resolution better than 30 nm is possible within a working volume of 140 mm3. Orientations of several degrees (up to plus or minus five degrees) are possible for the three rotational angles.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean-Marc Breguet, Jean-Marc Breguet, Eric Pernette, Eric Pernette, Reymond Clavel, Reymond Clavel, "Stick and slip actuators and parallel architectures dedicated to microrobotics", Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); doi: 10.1117/12.260626; https://doi.org/10.1117/12.260626
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