11 December 1996 Tabletop factory to fabricate 3D microstructures: nano manufacturing world
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Proceedings Volume 2906, Microrobotics: Components and Applications; (1996) https://doi.org/10.1117/12.260629
Event: Photonics East '96, 1996, Boston, MA, United States
Abstract
To fabricate 3D microstructures, the authors designed, constructed and evaluated a tabletop factory called 'nano manufacturing world (NMW).' We designed a compact, concentrated layout of fabricating/handling machines around a workpiece for an integrated production, and an image- assisted tele-operation system between the processing site and the operating site. Using various working processes developed in NMW, e.g. dry-etching with a fast atom beam or assembling with a concentrated motion manipulator under a scanning electron microscope, we demonstrated fabricating some 3D microstructures such as a micro-tower or a micro- airplane. In addition to fabricate functional film features on the 3D microstructures, we are producing a micro magnetic head or a micro optical circuit in NMW. Through the demonstration, we evaluate that NMW functions effectively as designed and will become a solution for micro manufacturing systems.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Masayuki Nakao, Masayuki Nakao, Yotaro Hatamura, Yotaro Hatamura, Tomomasa Sato, Tomomasa Sato, "Tabletop factory to fabricate 3D microstructures: nano manufacturing world", Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); doi: 10.1117/12.260629; https://doi.org/10.1117/12.260629
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