Trial of telemicromachining under SEM using ISDN

Mamoru Mitsuishi; Naohiko Sugita; Toshio Hori; Takaaki Nagao; Yotaro Hatamura

doi:10.1117/12.260621

11 December 1996 Trial of telemicromachining under SEM using ISDN

Mamoru Mitsuishi, Naohiko Sugita, Toshio Hori, Takaaki Nagao, Yotaro Hatamura

Proceedings Volume 2906, Microrobotics: Components and Applications; (1996) https://doi.org/10.1117/12.260621
Event: Photonics East '96, 1996, Boston, MA, United States

Abstract

This paper describes a tele-micro machining system which works under a stereo SEM and has operational environment transmission capability. The system includes a 3-axis force sensing table, the signal from which is converted into auditory information to enhance the operability of the system. Furthermore, the cutting state in micro-cutting is reflected as force feedback to the master joystick using a newly introduced index which represents the cutting state. The MMM (micro-machining machine) located at the University of Tokyo was operated from Karlsruhe University in Germany using ISDN. The cutting force in the micro-world using micro-endmill is analyzed and compared with that in the macro-world. The dependency of the crystal direction while scratching a single crystal silicon was analyzed. Finally, the internal damage while scratching a single crystal magnesium oxide was observed in real-time and analyzed.

Citation Download Citation

Mamoru Mitsuishi, Naohiko Sugita, Toshio Hori, Takaaki Nagao, and Yotaro Hatamura "Trial of telemicromachining under SEM using ISDN", Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); https://doi.org/10.1117/12.260621

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