11 December 1996 Trial of telemicromachining under SEM using ISDN
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Proceedings Volume 2906, Microrobotics: Components and Applications; (1996) https://doi.org/10.1117/12.260621
Event: Photonics East '96, 1996, Boston, MA, United States
Abstract
This paper describes a tele-micro machining system which works under a stereo SEM and has operational environment transmission capability. The system includes a 3-axis force sensing table, the signal from which is converted into auditory information to enhance the operability of the system. Furthermore, the cutting state in micro-cutting is reflected as force feedback to the master joystick using a newly introduced index which represents the cutting state. The MMM (micro-machining machine) located at the University of Tokyo was operated from Karlsruhe University in Germany using ISDN. The cutting force in the micro-world using micro-endmill is analyzed and compared with that in the macro-world. The dependency of the crystal direction while scratching a single crystal silicon was analyzed. Finally, the internal damage while scratching a single crystal magnesium oxide was observed in real-time and analyzed.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mamoru Mitsuishi, Naohiko Sugita, Toshio Hori, Takaaki Nagao, Yotaro Hatamura, "Trial of telemicromachining under SEM using ISDN", Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); doi: 10.1117/12.260621; https://doi.org/10.1117/12.260621
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