31 October 1996 High-speed electron beam data verification system using high-performance neural network accelerator board
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Abstract
We have developed a high speed automatic inspection system which verifies the validity of electron beam exposure data used for fabrication of VLSI photomasks. By employing neural network accelerator board and adopting a flexible verification scheme based on parallel processing, the system performs 100 times faster than the previous system running on a general purpose workstation. In this paper, the architecture of this system and some salient techniques implemented in the system are presented.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Toshiyuki Tamura, Toshiyuki Tamura, Dominique Bouchon, Dominique Bouchon, Pierre Fournier, Pierre Fournier, Koichi Moriizumi, Koichi Moriizumi, Ken-ichi Tanaka, Ken-ichi Tanaka, Kazuo Kyuma, Kazuo Kyuma, "High-speed electron beam data verification system using high-performance neural network accelerator board", Proc. SPIE 2908, Machine Vision Applications, Architectures, and Systems Integration V, (31 October 1996); doi: 10.1117/12.257257; https://doi.org/10.1117/12.257257
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