Translator Disclaimer
20 March 1997 Design of resonant device using microelectromechanical comb structure
Author Affiliations +
Proceedings Volume 2921, International Conference on Experimental Mechanics: Advances and Applications; (1997) https://doi.org/10.1117/12.269797
Event: International Conference on Experimental Mechanics: Advances and Applications, 1996, Singapore, Singapore
Abstract
The comb structure is a popular microstructure used in microelectromechanical devices. As a result, it is essential to understand the physics of the comb structure by understanding the levitating force associated with the comb structure. The design of the comb structure can be optimized by minimizing resonator friction and maximizing harmonic work per cycle. The comb structure is fabricated using the high aspect ratio process so as to produce stiffer comb fingers as well as to increase the capacitance between the comb fingers.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ai Qun Liu and Y. S. Chua "Design of resonant device using microelectromechanical comb structure", Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); https://doi.org/10.1117/12.269797
PROCEEDINGS
6 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Mechanical effects of fatigue and charge on CMOS MEMS
Proceedings of SPIE (August 09 2000)
Suspended thermal oxide trench isolation for SCS MEMS
Proceedings of SPIE (October 04 1998)
Laser annealing for high-Q MEMS resonators
Proceedings of SPIE (April 23 2003)

Back to Top