15 November 1996 Research of nondestructive detecton of microbulk defects in materials
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Abstract
In this paper, after having established a mathematical modeling of detecting micro bulk defects by Mie scattering theory, a novel way called near infrared laser scanning tomography (LST) technique is developed that can detect micro bulk defects in Si-based materials and has the advantages of high resolution and high contrast. Simulating experiments on micro bulk defects in glass are implemented and scattered graphs collected in the direction vertical to the incident light are processed in order to prove the rightness of the modeling. Satisfactory results are achieved which demonstrates that the scattering modeling is correct and that the LST non-destructive detection of micro bulk defects technique is feasible.
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Zheng You, Zheng You, Junbo Chen, Junbo Chen, Yang Ren, Yang Ren, } "Research of nondestructive detecton of microbulk defects in materials", Proc. SPIE 2944, Nondestructive Evaluation of Materials and Composites, (15 November 1996); doi: 10.1117/12.259043; https://doi.org/10.1117/12.259043
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