The surface contamination analysis technology (SCAT) team was originated as a working roup of NASA civil service, Space Shuttle contractor, and university groups. Participating members of the SCAT Team have included personnel from NASA Marshall Space Flight Center's Materials and Processes Laboratory and Langley Research Center's Instrument Development Group; contractors-Thiokol Corporation's Inspection Technology Group, AC Engineering support contractor, Aerojet, SAIC, and Lockheed MArtin/Oak Ridge Y-12 support contractor and Shuttle External Tank prime contractor; and the University of Alabama in Huntsville's Center for Robotics and Automation. The goal of the SCAT team as originally defined was to develop and integrate a multi-purpose inspection head for robotic application to in-process inspection of contamination sensitive surfaces. One area of interest was replacement of ozone depleting solvents currently used for surface cleanliness verification. The team approach brought together the appropriate personnel to determine what surface inspection techniques were applicable to multi-program surface cleanliness inspection. Major substrates of interest were chosen to simulate space shuttle critical bonding surface or surfaces sensitive to contamination such as fuel system component surfaces. Inspection techniques evaluated include optically stimulated electron emission or photoelectron emission; Fourier transform infrared spectroscopy; near infrared fiber optic spectroscopy; and, ultraviolet fluorescence. Current plans are to demonstrate an integrated system in MSFC's Productivity Enhancement Complex within five years from initiation of this effort in 1992. Instrumentation specifications and designs developed under this effort include a portable diffuse reflectance FTIR system built by Surface Optics Corporation and a third generation optically stimulated electron emission system built by LaRC. This paper will discuss the evaluation of the various techniques on a number of substrate materials contaminated with hydrocarbons, silicones, and fluorocarbons. Discussion will also include standards development for instrument calibration and testing.