13 May 1997 248-nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy
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Abstract
LaF3MgF2 high-reflectance optical multilayer coatings were deposited by e-beam evaporation and investigated by cross-sectional transmission electron microscopy concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that recrystallization took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave sublayers in the multilayer system increase with increasing distance from the substrate.This effect may result in increased scatter losses, especially in the ultraviolet spectral region.
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Zsolt Czigany, Miklos Adamik, Norbert Kaiser, "248-nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy", Proc. SPIE 2966, Laser-Induced Damage in Optical Materials: 1996, (13 May 1997); doi: 10.1117/12.274288; https://doi.org/10.1117/12.274288
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KEYWORDS
Interfaces

Multilayers

Magnesium fluoride

Laser irradiation

Transmission electron microscopy

Ultraviolet radiation

Optical coatings

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