13 May 1997 Near-field optical microscopy: application to investigation of surface laser-induced damage of transparent optical materials
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Abstract
Surface laser-induced damage of optical materials presents a major fundamental problem of light-matter interaction. The nature of surface optical damage is usually related to the presence of pre-existing and laser-induced inhomogeneities in optical properties of the material or inhomogeneities of the laser beam. SEM, STM, AFM and other techniques used to investigate the optical surface inhomogeneities do not provide direct measurements of the surface optical properties with high spatial resolution. Near-field optical microscopy (NFOM) has principal advantages compared to the mentioned techniques being applied to the investigation of defects characteristics and kinetics of evolution of surface laser-induced damage of optical materials: (1) NFOM provides optical data measurements at the wavelength of the damaging radiation with about 30 nm resolution; NFOM combined with AFM gives a topographical image of surface simultaneously with the optical data; (2) NFOM provides spectroscopy information; (3) NFOM technique provides measuring space field distribution induced by small surface and near-surface defects.
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Vitali E. Gruzdev, Mikhail N. Libenson, George A. Martsinovsky, Michael A. Paesler, M. J. Soileau, B. Yacobson, "Near-field optical microscopy: application to investigation of surface laser-induced damage of transparent optical materials", Proc. SPIE 2966, Laser-Induced Damage in Optical Materials: 1996, (13 May 1997); doi: 10.1117/12.274245; https://doi.org/10.1117/12.274245
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