Modification of LiNbO3 optical properties by He+ implantation

Irena Hruba; Jaroslav Kral

doi:10.1117/12.266532

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4 February 1997 Modification of LiNbO₃ optical properties by He⁺ implantation

Irena Hruba; Jaroslav Kral

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Proceedings Volume 2967, Optical Inorganic Dielectric Materials and Devices; (1997) https://doi.org/10.1117/12.266532
Event: International Conference on Advanced Optical Materials and Devices, 1996, Riga, Latvia

Abstract

Ion beam modified layer on x- and z-cuts of LiNbO₃ single crystal has been produced by 100 keV He ions implantation with doses from 1.10¹⁶ to 1.10¹⁷ at/cm^-2. Using ellipsometry, the complex refractive index [n-i.(lambda) .k/(4(pi) )] was measured for ordinary and extraordinary rays. The effect of ion beam modification depends on the ion beam orientation with respect to the crystal axes. Bombarding along the z-axis conserves the optical anisotropy of the material, both of the refractive index and the absorption coefficient.

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Irena Hruba and Jaroslav Kral "Modification of LiNbO₃ optical properties by He⁺ implantation", Proc. SPIE 2967, Optical Inorganic Dielectric Materials and Devices, (4 February 1997); https://doi.org/10.1117/12.266532

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