Laser direct writing system for fabrication of smooth-relief micro-optical elements

V. B. Svetovoy; Ildar I. Amirov; Yu. E. Babanov

doi:10.1117/12.262648

27 December 1996 Laser direct writing system for fabrication of smooth-relief micro-optical elements

V. B. Svetovoy, Ildar I. Amirov, Yu. E. Babanov

Proceedings Volume 2969, Second International Conference on Optical Information Processing; (1996) https://doi.org/10.1117/12.262648
Event: Second International Conference on Optical Information Processing, 1996, St. Petersburg, Russian Federation

Abstract

A direct writing system based on a pulsed N₂ laser is presented. It allows to create continuous relief in a number of polymeric materials. Polymers are etched in air directly under the laser beam action. It is possible to make a computer controlling smooth relief with a depth more than 40 micrometers . High speed cylindrical lens has been fabricated in polyamide film to demonstrate the abilities of the system.

Citation Download Citation

V. B. Svetovoy, Ildar I. Amirov, and Yu. E. Babanov "Laser direct writing system for fabrication of smooth-relief micro-optical elements", Proc. SPIE 2969, Second International Conference on Optical Information Processing, (27 December 1996); https://doi.org/10.1117/12.262648

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available