31 March 1997 Acoustic wave device for the translation of microparticles
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Abstract
The fabrication and characterization of a microfabricated, fexural plate, acoustic wave delay line is presented for use in the physical translation of fluids and/or biological cells. The device consists of dual interdigitated transducers patterned on a thin film composite membrane of silicon nitride, platinum, and sol gel derived piezoelectric ceramic (PZT). The acoustic properties of the device are presented along with preliminary applications to mechanical transport and liquid delivery systems. Improved acoustic signals and improved mass transport are achieved with PZT over present fexural plate wave devices employing ZnO as the piezoelectric material.
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Philippe Luginbuhl, Philippe Luginbuhl, Nico F. de Rooij, Nico F. de Rooij, Scott D. Collins, Scott D. Collins, Georges-Andre Racine, Georges-Andre Racine, Nava J. Setter, Nava J. Setter, K. G. Brooks, K. G. Brooks, } "Acoustic wave device for the translation of microparticles", Proc. SPIE 2978, Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications, (31 March 1997); doi: 10.1117/12.269963; https://doi.org/10.1117/12.269963
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