9 May 1997 Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass
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The direct-write laser machining technique has been used to process a lithium-alumosilicate glass (FoturanTM) for an application which requires 3D patterned microstructures. Using two UV laser wavelengths (248 nm and 355 nm), microcavities and microstructures have been fabricated for the development of microthrusters for attitude and orbit control of a 1 kg class (10 cm diameter) nanosatellite. In addition, experiments have been conducted to define the processing window for the laser patterning technique. The results include a measure of the change in Foturan strength after a required program bake cycle plus HF etching rates as a function of the laser repetition rate for the two UV wavelengths.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William W. Hansen, William W. Hansen, Siegfried W. Janson, Siegfried W. Janson, Henry Helvajian, Henry Helvajian, "Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass", Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); doi: 10.1117/12.273716; https://doi.org/10.1117/12.273716


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