Formation of Ti:sapphire thin films on single-crystal sapphire and GaAs substrates by pulsed laser deposition

Peter A. Atanasov; Rumen I. Tomov; Zahari Y. Peshev; Anna O. Dikovska; Vassilka N. Tzaneva

doi:10.1117/12.273735

9 May 1997 Formation of Ti:sapphire thin films on single-crystal sapphire and GaAs substrates by pulsed laser deposition

Peter A. Atanasov, Rumen I. Tomov, Zahari Y. Peshev, Anna O. Dikovska, Vassilka N. Tzaneva

Author Affiliations +

Proceedings Volume 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II; (1997) https://doi.org/10.1117/12.273735
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The results of pulsed laser deposition of Ti-doped and undoped sapphire ((alpha) -Al₂O₃) thin films are presented. Three types of doped targets are utilized -- monocrystalline and two different ceramics synthesized in vacuum and H₂ ambient, respectively. The doping procedure is related with the potential application of the Ti:sapphire thin films as planar tunable laser media. The influence of the target's type upon the film quality is studied. The films are characterized by XRD, RHEED, and SEM analyses. The optical emission measurements of the laser induced plasma plume are performed.

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Peter A. Atanasov, Rumen I. Tomov, Zahari Y. Peshev, Anna O. Dikovska, and Vassilka N. Tzaneva "Formation of Ti:sapphire thin films on single-crystal sapphire and GaAs substrates by pulsed laser deposition", Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); https://doi.org/10.1117/12.273735

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