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9 May 1997 Laser depth-controlled precision machining of advanced ceramics
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Abstract
Development of advanced engineering materials, such as ceramics and their composites, CVD silicon carbide, silicon nitride, CVD diamond, etc.; has created many opportunities for their use in a number of applications. These materials offer attractive properties, including superior hardness, strength, wear and corrosion resistance, and electronic properties. However, conventional machining processes are inadequate to fabricate multi-dimensional, precision components from these materials. Lately, lasers have been shown to be very effective in machining these hard materials. In this paper, recent results of our work on depth controlled precision machining of commercially available ceramics using a diode pumped, pulsed Nd:YAG laser are presented. The effects of laser processing parameters: percentage spot overlap, machining speed, and number of layers removed on the depth of the machined groove and surface roughness are discussed.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Suwas K. Nikumb and M. U. Islam "Laser depth-controlled precision machining of advanced ceramics", Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); https://doi.org/10.1117/12.273725
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