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31 March 1997 Coaxial, cylindrical, and planar UV excilamps pumped by glow or barrier discharge
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Design and operating parameters of powerful KrCl((lambda) approximately 222nm), XeCl((lambda) approximately 308nm) excilamps with different discharge geometry pumped by continuous glow discharges along with Ar2((lambda) approximately 126nm) and Kr2((lambda) approximately 146nm) excilamps pumped by barrier discharge are presented. Excilamps with high spatial uniformity of the output and gas lifetime up to 100 hours were developed. It was shown that efficiency of luminescence of exciplex molecules of about 30 percent can be obtained in high-voltage glow discharge and positive column of glow discharge. Output at (lambda) approximately 222nm up to 200 W from single excilamp and 500 W from three excilamps, operated in parallel, was demonstrated.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Victor F. Tarasenko, Mikhail I. Lomaev, Alexei N. Panchenko, and Edward A. Sosnin "Coaxial, cylindrical, and planar UV excilamps pumped by glow or barrier discharge", Proc. SPIE 2992, Excimer Lasers, Optics, and Applications, (31 March 1997);


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