31 March 1997 Performance characteristics of a high-energy, high-pulse repetition frequency krypton fluoride laser
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Abstract
As applications have evolved out of the research areas, laser beam properties and component lifetimes have become critical to achieving low operating cost in a manufacturing environment. We will discuss the development of a 110 watt KrF laser using an all solid-state pulsed power system. Solid state pulsed power enables a significant reduction in system operating costs by greatly extending the exchange interval of the pulsed power and discharge chamber modules. Beam properties of the laser using both stable and unstable resonator configurations will be discussed.
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Tom A. Watson, Richard Ujazdowski, Palash P. Das, "Performance characteristics of a high-energy, high-pulse repetition frequency krypton fluoride laser", Proc. SPIE 2992, Excimer Lasers, Optics, and Applications, (31 March 1997); doi: 10.1117/12.270095; https://doi.org/10.1117/12.270095
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