Small excimers opening up new industrial applications

Glenn Ogura; Rod Andrew

doi:10.1117/12.270091

31 March 1997 Small excimers opening up new industrial applications

Glenn Ogura, Rod Andrew

Proceedings Volume 2992, Excimer Lasers, Optics, and Applications; (1997) https://doi.org/10.1117/12.270091
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The development of small excimer lasers with relatively small pulse energies but with the capability of reaching high repetition rates, coupled to acceptable gas lifetimes and good beam quality, has opened up new opportunities for laser applications in manufacturing. In some niche applications, such as ophthalmology and micromachining, these lasers provide comparable energy density to their much larger counterparts and with proper overall laser system design, sufficient target areas can be covered. Such small lasers allow production engineers to seriously consider using such laser systems due to the reduced capital investment and small footprint. This paper explores some of the new applications and benefits of this technology.

Citation Download Citation

Glenn Ogura and Rod Andrew "Small excimers opening up new industrial applications", Proc. SPIE 2992, Excimer Lasers, Optics, and Applications, (31 March 1997); https://doi.org/10.1117/12.270091

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