27 March 1997 5-nm resolution in a vibrating environment with a 1-mm dynamic range
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Abstract
We report the first demonstration of high resolution mm dynamic range measurements using sinusoidal phase modulation interferometry. Our novel method has increased the range by over 3 orders of magnitude, while maintaining ultra-high accuracy. Simple commercial laser diodes were used and a new algorithm allowed for the first ultra-high accuracy and high dynamic range in real time for a slightly vibrating environment.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yifang Wu, C. K. Man, Bing Yin, Michael K. Giles, Thomas M. Shay, "5-nm resolution in a vibrating environment with a 1-mm dynamic range", Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); doi: 10.1117/12.270027; https://doi.org/10.1117/12.270027
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