27 March 1997 Destruction of silicon and copper surface under pulsed and pulse periodic action of YAG:Nd laser
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Abstract
The paper presents the results of the study of silicon and copper surface destruction under pulsed and pulse-periodic action of YAG:Nd laser radiation. The anomalies have been discovered in the probe beam of He-Ne laser scattered from the silicon surface under its irradiation with a series of YAG:Nd laser pulses at I less than Imelt. (where Imelt. is the surface melting threshold). These anomalies are supposedly related to formation of surface layer saturated with defects.
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Alexander F. Banishev, Alexander F. Banishev, Elena A. Baliikina, Elena A. Baliikina, } "Destruction of silicon and copper surface under pulsed and pulse periodic action of YAG:Nd laser", Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); doi: 10.1117/12.270025; https://doi.org/10.1117/12.270025
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