27 March 1997 Effects of taper on drilling and cutting with a pulsed laser
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Abstract
An inherent characteristic of laser machined features is taper. For a particular laser the degree of taper is largely dependent on two things: the type of material being machined and the laser energy per unit area or fluence at the processing surface. The latter of these is dependent on different parameters for the three lasers mentioned above. In this paper we review the particular laser parameters that control taper and what degree of taper can be expected for certain materials. More often than not taper is a nondesirable characteristic and is, in many cases, the limiting factor regarding the maximum thickness of material that a laser is practically capable of drilling or cutting through. We therefore discuss methods of minimizing taper and its effects. Under some circumstances taper can be used to one's advantage to achieve a desired feature size if one has control over the taper angle.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James Angell, James Angell, Wen Ho, Wen Ho, Ronald D. Schaeffer, Ronald D. Schaeffer, } "Effects of taper on drilling and cutting with a pulsed laser", Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); doi: 10.1117/12.270024; https://doi.org/10.1117/12.270024
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