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27 March 1997 Polyimide processing with a cw pumped q-switched frequency-doubled Nd:YLF laser
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Abstract
A frequency doubled Nd:YLF laser is investigated as a potential source for photoablation of polyimide films. The hole diameter as a function of incident laser power is studied in a 25 micron thick free standing polyimide film. The photoetched vias are inspected by optical microscopy and show a relatively clean surface surrounding the entrance diameter. The microscopy studies also reveal that the vias exhibit a shape which has three characteristic diameters. The entrance and exit diameters are of similar dimension and define a melt zone region. A uniform circular waist diameter, which is smaller than entrance and exit diameters, can only be obtained with 5 to 10 laser pulses and pulse energies above 4 mJ.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeffrey S. Bernstein, Jay A. Guerette, and Ronald D. Schaeffer "Polyimide processing with a cw pumped q-switched frequency-doubled Nd:YLF laser", Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); https://doi.org/10.1117/12.270021
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