Nanofabrication via atom optics with chromium

Jabez J. McClelland; W. R. Anderson; Robert J. Celotta

doi:10.1117/12.273745

1 May 1997 Nanofabrication via atom optics with chromium

Jabez J. McClelland, W. R. Anderson, Robert J. Celotta

Proceedings Volume 2995, Atom Optics; (1997) https://doi.org/10.1117/12.273745
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Through the use of light forces exerted by near-resonant laser light, chromium atoms are focused as they deposit onto a substrate, forming nanometer-scale structures on the surface. The laser light is in the form of a standing wave, in which each node acts as an atom-optical `lens.'. The result is a highly accurate array of lines with a periodicity of (lambda) /2 equals 212.78 nm and full-width at half maximum as small as 38 nm. We discuss progress with this process, in particular the fabrication of a 2D array, the creation of an array with (lambda) /8 periodicity, the replication of the array in polymer material, the production of magnetic nanowires, and the reactive-ion etching of a chromium pattern on silicon to generate an array of distinct nanowires and/or nanotrenches.

Citation Download Citation

Jabez J. McClelland, W. R. Anderson, and Robert J. Celotta "Nanofabrication via atom optics with chromium", Proc. SPIE 2995, Atom Optics, (1 May 1997); https://doi.org/10.1117/12.273745

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