1 May 1997 Nanofabrication via atom optics with chromium
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Through the use of light forces exerted by near-resonant laser light, chromium atoms are focused as they deposit onto a substrate, forming nanometer-scale structures on the surface. The laser light is in the form of a standing wave, in which each node acts as an atom-optical `lens.'. The result is a highly accurate array of lines with a periodicity of (lambda) /2 equals 212.78 nm and full-width at half maximum as small as 38 nm. We discuss progress with this process, in particular the fabrication of a 2D array, the creation of an array with (lambda) /8 periodicity, the replication of the array in polymer material, the production of magnetic nanowires, and the reactive-ion etching of a chromium pattern on silicon to generate an array of distinct nanowires and/or nanotrenches.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jabez J. McClelland, Jabez J. McClelland, W. R. Anderson, W. R. Anderson, Robert J. Celotta, Robert J. Celotta, } "Nanofabrication via atom optics with chromium", Proc. SPIE 2995, Atom Optics, (1 May 1997); doi: 10.1117/12.273745; https://doi.org/10.1117/12.273745

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