23 January 1997 Integration of optical devices on planar substrates
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Abstract
Thirty years after first envisioned, integrated planar optical devices are being commercialized. The markets driving commercialization are discussed. The types of planar devices and fabrication techniques are described. The technologies required for planar integration are then reviewed. Finally, some challenges facing commercialization are explored.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian Lerminaux, Richard O. Maschmeyer, "Integration of optical devices on planar substrates", Proc. SPIE 2997, Integrated Optics Devices: Potential for Commercialization, (23 January 1997); doi: 10.1117/12.264144; https://doi.org/10.1117/12.264144
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