23 January 1997 Organoaluminophosphate sol-gel silica glass thin films for integrated optics
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We report on the fabrication and characterization of waveguide thin films on silicon by ultraviolet light imprinting in a new photosensitive, organically modified aluminophosphate sol-gel silica glass prepared by a one-step dip-coating process. Appropriate combinations of ultraviolet light exposure time, sol-gel film thickness and postbake parameters produce waveguides suitable for optical telecommunication applications.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tahar Touam, Galina Milova, Z. Saddiki, M. Amir Fardad, Mark P. Andrews, Salim K. Juma, Jacek Chrostowski, S. Iraj Najafi, "Organoaluminophosphate sol-gel silica glass thin films for integrated optics", Proc. SPIE 2997, Integrated Optics Devices: Potential for Commercialization, (23 January 1997); doi: 10.1117/12.264135; https://doi.org/10.1117/12.264135

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