23 January 1997 Silicon-on-insulator photonic integrated circuit (SOI-PIC) technology
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Proceedings Volume 2997, Integrated Optics Devices: Potential for Commercialization; (1997); doi: 10.1117/12.264133
Event: Photonics West '97, 1997, San Jose, CA, United States
Abstract
This paper describes the application of the silicon-on- insulator (SOI) technology as a platform for low cost guided-wave optics. Recent progress in material and device technologies are reviewed and results on multimode interference couplers, thermo-optics switches, and phased array wavelength filters in SOI are presented.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bahram Jalali, "Silicon-on-insulator photonic integrated circuit (SOI-PIC) technology", Proc. SPIE 2997, Integrated Optics Devices: Potential for Commercialization, (23 January 1997); doi: 10.1117/12.264133; https://doi.org/10.1117/12.264133
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KEYWORDS
Waveguides

Silicon

Photonic integrated circuits

Brain-machine interfaces

Semiconducting wafers

Phased array optics

Silica

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