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15 April 1997 Optical coupling mechanisms in quantum well infrared photodetectors
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Abstract
Light coupling systems, such as gratings are required because quantum well infrared photodetectors do not respond to normal incident light due to the quantum mechanical selection rules associated with intersubband transitions. The resolution of the photolithography and accuracy of the etching become key issues in producing smaller grating features sizes especially in shorter wavelengths. An enhancement factor of three due to 2D periodic grating fabricated on a QWIP structure was observed. Variation of the enhancement factor with groove depth and feature size of the grating can be theoretically explained.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sumith V. Bandara, Sarath D. Gunapala, John K. Liu, Winn Hong, and Jin Suk Park "Optical coupling mechanisms in quantum well infrared photodetectors", Proc. SPIE 2999, Photodetectors: Materials and Devices II, (15 April 1997); https://doi.org/10.1117/12.271180
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